The AcXel accelerometer is the first MEMS accelerometer to utilize our patented electro-optical technology. This new optical approach to MEMS accelerometers allows performance not possible using traditional capacitive techniques.
Some of the benefits of the AcXel accelerometer include:
- Extreme Sensitivity: Max Transduction values of 75 Micro-Amps/Nanometer
- High Signal to Noise Ratio: Greater than 20 bits of resolution
- Low Bias Stability: Less than 50 µg
- Improved Low Frequency Response: True DC response
The concept behind the AcXel accelerometer utilizes our patented optical technique to measure the displacement of a suspended proof-mass shown here in the video. As with all displacement sensing technologies, the more accurately the movement of the proof-mass can be measured, the more accurately the applied acceleration can be measured.
Our technique has measured displacements of the proof-mass as small as 10e-15 meters (10 femto-meters), or approximately the diameter of a proton. This is the best known value for smallest displacement ever measured by a MEMS device.
Our patented UMIDS manufacturing process allows us to build both upper and lower crystalline springs to support our proof-mass. The dual spring approach improves stability and reduces cross-axis sensitivity. The use of crystalline springs gives our sensors greater repeatability, reduced long-term drift, and longer product life over other MEMS displacement sensors.
Seismic Imaging (Oil Exploration):
Seismic imaging is a technique used to explore for oil deposits that is analogous to an ultrasound of the earth. Accelerometers offer improved performance over geophones, the traditional seismic imaging sensor. Lumedyne's AcXel out performs existing accelerometers and can do so at a reduced cost.
Industrial & Structural Monitoring:
Accelerometers are used to monitor the health of machines and buildings by measuring their natural vibrations. By doing so, engineers can determine when important maintenance or repairs need to take place. Applications requiring higher performance accelerometers typically employ larger, more expensive piezoelectric accelerometers because MEMS based accelerometers do not deliver the required performance in terms of resolution and/or frequency response. LTI’s accelerometer can offer higher resolution accelerometers than piezoelectric over the same frequency ranges for a lower price.
